Oxide interface studies using second harmonic generation

Autor: Tolk, N.H., Alles, M.L., Pasternak, R., Lu, X., Schrimpf, R.D., Fleetwood, D.M., Dolan, R.P., Standley, R.W.
Zdroj: In Microelectronic Engineering 2007 84(9):2089-2092
Databáze: ScienceDirect