Integration of functional epitaxial oxides into silicon: from high- k application to nanostructures
| Autor: | Osten, H.J., Czernohorsky, M., Dargis, R., Laha, A., Kühne, D., Bugiel, E., Fissel, A. |
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| Zdroj: | In Microelectronic Engineering 2007 84(9):2222-2225 |
| Databáze: | ScienceDirect |
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