Modified space-charge limited conduction in tantalum pentoxide MIM capacitors
Autor: | Martinez, V., Besset, C., Monsieur, F., Montès, L., Ghibaudo, G. |
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Zdroj: | In Microelectronic Engineering 2007 84(9):2310-2313 |
Databáze: | ScienceDirect |
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