Fabrication of microchannel containing nanopillar arrays using micromachined AAO (anodic aluminum oxide) mold
| Autor: | Kim, Dong Sung, Lee, Han Ul, Kim, Nam Hyo, Lee, Kun-Hong, Cho, Dong-Woo, Kwon, Tai Hun |
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| Zdroj: | In Microelectronic Engineering 2007 84(5):1532-1535 |
| Databáze: | ScienceDirect |
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