Fabrication of force sensors based on two-dimensional photonic crystal technology
| Autor: | Stomeo, T., Grande, M., Qualtieri, A., Passaseo, A., Salhi, A., De Vittorio, M., Biallo, D., D’orazio, A., De Sario, M., Marrocco, V., Petruzzelli, V., Prudenzano, F. |
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| Zdroj: | In Microelectronic Engineering 2007 84(5):1450-1453 |
| Databáze: | ScienceDirect |
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