Fabrication of silicon 3D taper structures for optical fibre to chip interface
| Autor: | Holly, Roman, Hingerl, Kurt, Merz, Robert, Hudek, Peter |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(5):1248-1251 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Holly, Roman, Hingerl, Kurt, Merz, Robert, Hudek, Peter |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(5):1248-1251 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect