X-ray lithography for devices with high aspect ratio polymer submicron structures
| Autor: | Mappes, Timo, Achenbach, Sven, Mohr, Juergen |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(5):1235-1239 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mappes, Timo, Achenbach, Sven, Mohr, Juergen |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(5):1235-1239 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect