Silicon cryo-etching of deep holes
| Autor: | Tillocher, T., Dussart, R., Mellhaoui, X., Lefaucheux, P., Boufnichel, M., Ranson, P. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(5):1120-1123 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Tillocher, T., Dussart, R., Mellhaoui, X., Lefaucheux, P., Boufnichel, M., Ranson, P. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(5):1120-1123 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect