Stochastic simulation studies of molecular resists
| Autor: | Drygiannakis, D., Patsis, G.P., Raptis, I., Niakoula, D., Vidali, V., Couladouros, E., Argitis, P., Gogolides, E. |
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| Zdroj: | In Microelectronic Engineering 2007 84(5):1062-1065 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect