3D structures for UV-NIL template fabrication with grayscale e-beam lithography
| Autor: | Piaszenski, Guido, Barth, Ulrich, Rudzinski, Axel, Rampe, Andreas, Fuchs, Andreas, Bender, Markus, Plachetka, Ulrich |
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| Zdroj: | In Microelectronic Engineering 2007 84(5):945-948 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect