Polarized illuminator impact on line edge roughness
| Autor: | Verhappen, Arjan, Kuijten, Jan Pieter, Conley, Will, Chaplin, Martin, Vleuten, Paul van der, Goor, Stephan van der, Litt, Lloyd, Kasprowicz, Bryan |
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| Zdroj: | In Microelectronic Engineering 2007 84(5):746-749 |
| Databáze: | ScienceDirect |
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