Simple fabrication of nanostructure by continuous rigiflex imprinting
| Autor: | Seo, Soon-min, Kim, Tae-il, Lee, Hong H. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(4):567-572 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Seo, Soon-min, Kim, Tae-il, Lee, Hong H. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2007 84(4):567-572 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect