Lateral crystallization of amorphous silicon by germanium seeding
| Autor: | Hakim, M.M.A., Matko, I., Chenevier, B., Ashburn, P. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2006 83(11):2437-2440 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hakim, M.M.A., Matko, I., Chenevier, B., Ashburn, P. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2006 83(11):2437-2440 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect