Characterization of electrical and crystallographic properties of metal layers at deca-nanometer scale using Kelvin probe force microscope
| Autor: | Gaillard, N., Mariolle, D., Bertin, F., Gros-Jean, M., Proust, M., Bsiesy, A., Bajolet, A., Chhun, S., Djebbouri, M. |
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| Zdroj: | In Microelectronic Engineering 2006 83(11):2169-2174 |
| Databáze: | ScienceDirect |
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