New techniques to characterize properties of advanced dielectric barriers for sub-65 nm technology node
| Autor: | Vitiello, J., Ducote, V., Farcy, A., Gosset, L.G., Le-Friec, Y., Hopstaken, M., Jullian, S., Cordeau, M., Ailhas, C., Chapelon, L.L., Barbier, D., Veillerot, M., Danel, A., Torres, J. |
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| Zdroj: | In Microelectronic Engineering 2006 83(11):2130-2135 |
| Databáze: | ScienceDirect |
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