Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device
Autor: | Knoll, A., Dürig, U., Züger, O., Güntherodt, H.-J. |
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Zdroj: | In Microelectronic Engineering 2006 83(4):1261-1264 |
Databáze: | ScienceDirect |
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