Manufacturable MEMS miniSEMs
| Autor: | Saini, R., Jandric, Z., Gammell, J., Mentink, S.A.M., Tuggle, D. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2006 83(4):1376-1381 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Saini, R., Jandric, Z., Gammell, J., Mentink, S.A.M., Tuggle, D. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2006 83(4):1376-1381 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect