Ordered SiGe islands on vicinal and pre-patterned Si(0 0 1) substrates
Autor: | Zhong, Z., Lichtenberger, H., Chen, G., Mühlberger, M., Schelling, C., Myslivecek, J., Halilovic, A., Stangl, J., Bauer, G., Jantsch, W., Schäffler, F. |
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Zdroj: | In Microelectronic Engineering 2006 83(4):1730-1735 |
Databáze: | ScienceDirect |
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