Ordered SiGe islands on vicinal and pre-patterned Si(0 0 1) substrates

Autor: Zhong, Z., Lichtenberger, H., Chen, G., Mühlberger, M., Schelling, C., Myslivecek, J., Halilovic, A., Stangl, J., Bauer, G., Jantsch, W., Schäffler, F.
Zdroj: In Microelectronic Engineering 2006 83(4):1730-1735
Databáze: ScienceDirect