Electron beam lithography, a helpful tool for nanooptics
| Autor: | Hohenau, Andreas, Ditlbacher, Harald, Lamprecht, Bernhard, Krenn, Joachim R., Leitner, Alfred, Aussenegg, Franz R. |
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| Zdroj: | In Microelectronic Engineering 2006 83(4):1464-1467 |
| Databáze: | ScienceDirect |
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