Mechanical characterization of membrane like microelectronic components
| Autor: | Držı́k, M., Löschner, H., Haugeneder, E., Fallman, W., Hudek, P., Rangelow, I.W., Sarov, Y., Lalinský, T., Chlpı́k, J. |
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| Zdroj: | In Microelectronic Engineering 2006 83(4):1036-1042 |
| Databáze: | ScienceDirect |
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