Adhesion improvement of ArF resist pattern depending on BARC material
| Autor: | Kawai, Akira, Moriuchi, Takahiro, Niiyama, Takayoshi, Kishioka, Takahiro, Maruyama, Daisuke, Sakaida, Yasushi, Matsumoto, Takashi |
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| Zdroj: | In Microelectronic Engineering 2006 83(4):659-662 |
| Databáze: | ScienceDirect |
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