Stable electrochemically passivated Si surfaces by ultra thin benzene-type layers
| Autor: | Rappich, J., Hartig, P., Nickel, N.H., Sieber, I., Schulze, S., Dittrich, Th. |
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| Zdroj: | In Microelectronic Engineering 17 June 2005 80:62-65 |
| Databáze: | ScienceDirect |
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