The electrical properties of Metal–Ferroelectric (PbZr0.53Ti0.47O3)–Insulator–Silicon (MFIS) capacitors with different insulator materials

Autor: Juan, Pi-chun, Hu, Yu-ping, Chiu, Fu-chien, Lee, Joseph Ya-min
Zdroj: In Microelectronic Engineering 17 June 2005 80:309-312
Databáze: ScienceDirect