The electrical properties of Metal–Ferroelectric (PbZr0.53Ti0.47O3)–Insulator–Silicon (MFIS) capacitors with different insulator materials
Autor: | Juan, Pi-chun, Hu, Yu-ping, Chiu, Fu-chien, Lee, Joseph Ya-min |
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Zdroj: | In Microelectronic Engineering 17 June 2005 80:309-312 |
Databáze: | ScienceDirect |
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