Characterisation of a new hump-free device structure for smart power and embedded memory technologies

Autor: Schwantes, Stefan, Fuerthaler, Josef, Stephan, Thilo, Graf, Michael, Dudek, Volker, Barry, Tim, Miller, Gayle, Shen, James
Zdroj: In Microelectronic Engineering 2005 81(1):132-139
Databáze: ScienceDirect