Design of low Tg thermosets for short cycle time nanoimprint lithography
| Autor: | Reuther, F., Fink, M., Kubenz, M., Schuster, C., Vogler, M., Gruetzner, G. |
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| Zdroj: | In Microelectronic Engineering 2005 78:496-502 |
| Databáze: | ScienceDirect |
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| Autor: | Reuther, F., Fink, M., Kubenz, M., Schuster, C., Vogler, M., Gruetzner, G. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2005 78:496-502 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect