Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system
| Autor: | Stomeo, T., Visimberga, G., Todaro, M.T., Passaseo, A., Cingolani, R., De Vittorio, M., Cabrini, S., Carpentiero, A., Di Fabrizio, E. |
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| Zdroj: | In Microelectronic Engineering 2005 78:417-421 |
| Databáze: | ScienceDirect |
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