Characterization of pneumatically activated microvalves by measuring electrical conductance
| Autor: | Galas, J.-C. *, Studer, V., Chen, Y. |
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| Zdroj: | In Microelectronic Engineering 2005 78:112-117 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Galas, J.-C. *, Studer, V., Chen, Y. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2005 78:112-117 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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