Fabrication of refractive X-ray focusing lenses by deep X-ray lithography
| Autor: | Pérennès, F., Matteucci, M., Jark, W., Marmiroli, B. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2005 78:79-87 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Pérennès, F., Matteucci, M., Jark, W., Marmiroli, B. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2005 78:79-87 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect