Monte-Carlo simulation of low-energy electron scattering in PMMA – using stopping powers from dielectric formalism
| Autor: | Tan, Zhenyu, Xia, YueYuan, Liu, Xiangdong, Zhao, Minwen |
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| Zdroj: | In Microelectronic Engineering 2005 77(3):285-291 |
| Databáze: | ScienceDirect |
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