Analysis of surface contamination on organosilicate low k dielectric materials
| Autor: | Lu, D. *, Kumar, R., Chang, C.-K., Du, A.-Y., Wong, T.K.S. |
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| Zdroj: | In Microelectronic Engineering 2005 77(1):63-70 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Lu, D. *, Kumar, R., Chang, C.-K., Du, A.-Y., Wong, T.K.S. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2005 77(1):63-70 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect