Plasma sealing of a low-K dielectric polymer
| Autor: | Martin Hoyas, A. *, Schuhmacher, J., Whelan, C.M., Celis, J.P., Maex, K. |
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| Zdroj: | In Microelectronic Engineering October 2004 76(1-4):32-37 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Martin Hoyas, A. *, Schuhmacher, J., Whelan, C.M., Celis, J.P., Maex, K. |
|---|---|
| Zdroj: | In Microelectronic Engineering October 2004 76(1-4):32-37 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect