UV curing of resists for warm embossing
| Autor: | Wissen, M., Schulz, H., Bogdanski, N., Scheer, H.-C., Hirai, Y., Kikuta, H., Ahrens, G., Reuther, F., Pfeiffer, K. |
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| Zdroj: | In Microelectronic Engineering 2004 73:184-189 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect