Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
| Autor: | Lemberger, M, Paskaleva, A, Zürcher, S, Bauer, A.J, Frey, L, Ryssel, H |
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| Zdroj: | In Microelectronic Engineering 2004 72(1):315-320 |
| Databáze: | ScienceDirect |
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