Potential of amorphous Mo–Si–N films for nanoelectronic applications
| Autor: | Ylönen, M. ∗, Kattelus, H., Savin, A., Kivinen, P., Haatainen, T., Ahopelto, J. |
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| Zdroj: | In Microelectronic Engineering 2003 70(2):337-340 |
| Databáze: | ScienceDirect |
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