Simulation of local mechanical stresses in lines on substrate
| Autor: | Loubens, Audrey ∗, Fortunier, Roland, Fillit, René, Thomas, Olivier |
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| Zdroj: | In Microelectronic Engineering 2003 70(2):455-460 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Loubens, Audrey ∗, Fortunier, Roland, Fillit, René, Thomas, Olivier |
|---|---|
| Zdroj: | In Microelectronic Engineering 2003 70(2):455-460 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect