Reactively sputtered tantalum pentoxide thin films for integrated capacitors
| Autor: | Riekkinen, T ∗, Molarius, J |
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| Zdroj: | In Microelectronic Engineering 2003 70(2):392-397 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Riekkinen, T ∗, Molarius, J |
|---|---|
| Zdroj: | In Microelectronic Engineering 2003 70(2):392-397 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect