In situ plasma diagnostics for chemical vapor deposition of nano-carbon thin film materials
| Autor: | Obraztsov, A.N. a, ∗, Zolotukhin, A.A. a, Ustinov, A.O. a, Volkov, A.P. a, Svirko, Yu. b, Jefimovs, K. b |
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| Zdroj: | In Microelectronic Engineering 2003 69(2):446-451 |
| Databáze: | ScienceDirect |
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