Oxygen vacancy defects in tantalum pentoxide: a density functional study
| Autor: | Ramprasad, R. ∗, Sadd, Michael, Roberts, Doug, Remmel, Tom, Raymond, Mark, Luckowski, Eric, Kalpat, Sriram, Barron, Carole, Miller, Mel |
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| Zdroj: | In Microelectronic Engineering 2003 69(2):190-194 |
| Databáze: | ScienceDirect |
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