Investigation into patterning of a stack-type Ru electrode capacitor
| Autor: | Kim, Hyoun Woo ∗, Kang, Chang-Jin |
|---|---|
| Zdroj: | In Microelectronic Engineering 2003 69(1):89-96 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kim, Hyoun Woo ∗, Kang, Chang-Jin |
|---|---|
| Zdroj: | In Microelectronic Engineering 2003 69(1):89-96 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect