Investigation into the patterning of a concave-type Pt electrode capacitor using the reactive ion etching method
| Autor: | Kim, Hyoun Woo ∗, Ju, Byong-Sun, Kang, Chang-Jin |
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| Zdroj: | In Microelectronic Engineering 2003 65(4):489-497 |
| Databáze: | ScienceDirect |
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