Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
| Autor: | Maximov, I. ∗, Carlberg, P., Shorubalko, I., Wallin, D., Sarwe, E-L., Beck, M., Graczyk, M., Seifert, W., Xu, H.Q., Montelius, L., Samuelson, L. |
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| Zdroj: | In Microelectronic Engineering 2003 67:196-202 |
| Databáze: | ScienceDirect |
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