Study of platinum thin films deposited by MOCVD as electrodes for oxide applications
| Autor: | Valet, O. ∗, Doppelt, P., Baumann, P.K., Schumacher, M., Balnois, E., Bonnet, F., Guillon, H. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2002 64(1):457-463 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect