Influence of substrate on mechanical properties of TiN/NbN superlattices
| Autor: | Wrzesińska, H. ∗, Grabiec, P., Rymuza, Z., Misiak, M. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2002 61:1009-1014 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Wrzesińska, H. ∗, Grabiec, P., Rymuza, Z., Misiak, M. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2002 61:1009-1014 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect