Polymer stamps for nanoimprinting

Autor: Pfeiffer, K., Fink, M., Ahrens, G., Gruetzner, G., Reuther, F. ∗, Seekamp, J., Zankovych, S., Sotomayor Torres, C.M., Maximov, I., Beck, M., Graczyk, M., Montelius, L., Schulz, H., Scheer, H.-C., Steingrueber, F.
Zdroj: In Microelectronic Engineering 2002 61:393-398
Databáze: ScienceDirect
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