Investigation of long throw PVD of titanium films from polycrystalline targets with texture
| Autor: | Wolf, H. ∗, Streiter, R., Tirschler, W., Giegengack, H., Urbansky, N., Gessner, T. |
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| Zdroj: | In Microelectronic Engineering 2002 63(4):329-345 |
| Databáze: | ScienceDirect |
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