Resistless patterning of quantum nanostructures by local anodization with an atomic force microscope
| Autor: | Bouchiat, V. ∗, Faucher, M., Fournier, T., Pannetier, B., Thirion, C., Wernsdorfer, W., Clément, N., Tonneau, D., Dallaporta, H., Safarov, S., Villegier, J.C., Fraboulet, D., Mariolle, D., Gautier, J. |
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| Zdroj: | In Microelectronic Engineering 2002 61:517-522 |
| Databáze: | ScienceDirect |
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