Template fabrication schemes for step and flash imprint lithography
| Autor: | Bailey, T.C., Resnick, D.J. ∗, Mancini, D., Nordquist, K.J., Dauksher, W.J., Ainley, E., Talin, A., Gehoski, K., Baker, J.H., Choi, B.J., Johnson, S., Colburn, M., Meissl, M., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G. |
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| Zdroj: | In Microelectronic Engineering 2002 61:461-467 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect