Deeply etched two-dimensional photonic crystals fabricated on GaAs/AlGaAs slab waveguides by using chemically assisted ion beam etching
| Autor: | Avary, K. ∗, Reithmaier, J.P., Klopf, F., Happ, T., Kamp, M., Forchel, A. |
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| Zdroj: | In Microelectronic Engineering 2002 61:875-880 |
| Databáze: | ScienceDirect |
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