SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis
| Autor: | Grabiec, P. ∗, Gotszalk, T., Radojewski, J., Edinger, K., Abedinov, N., Rangelow, I.W. |
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| Zdroj: | In Microelectronic Engineering 2002 61:981-986 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect