Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission
| Autor: | Barth, W., Debski, T., Abedinov, N., Ivanov, Tz., Heerlein, H., Volland, B., Gotszalk, T., Rangelow, I.W. ∗, Torkar, K., Fritzenwallner, K., Grabiec, P., Studzińska, K., Kostic, I., Hudek, P. |
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| Zdroj: | In Microelectronic Engineering 2001 57:825-831 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect